Vacuum coating cluster

Vacuum coating cluster

Vacuum coating cluster
Thin film deposition

Thin film production


The SAF 25/50 multifunctional R&D cluster tool is intended for research and development works as well as for feasibility studies and more general academic work in the field of thin film technologies.

The tool is a multifunctional, expandable, modular and flexible system. The tool comprises an input/output chamber with ion gun, central substrate transfer chamber with radial telescopic transport arm and up to 7 deposition chambers. Substrate is positioned horizontally on a holder. Deposition zones are configured for substrate rotation or displacement during upward deposition.

Tool multifunctionality and flexibility is founded on the following key features:

  • each chamber can operate independently due to individual pumping means, controls and utility connections (deposition chambers and deposition sources are interchangeable);
  • the central transfer chamber prevents process cross-contamination and ensures substrate transfer without venting of the chambers;
  • various types of deposition sources including sublimation thermal cells, resistive boats, crucibles and sputter magnetrons can be integrated;
  • twin, single and dual sputter magnetrons can be powered by DC, pulsed DC, MF and RF power supplies (contact and contactless cooling and heating of the substrate is offered);
  • glove box for substrate loading in inert gas atmosphere and substrate magazine can be added;
  • preliminary agreed number of blanked-off flanges installed on the chambers allows attaching customized instrumentation and technological accessories;
  • basic configuration of the pumping system includes turbomolecular and two-stage dry mechanical pumps (the control system can operate in a semi-automatic and manual mode).


  • substrate: glass, metal, plastic, ceramic;
  • substrate size: 25 x 25 or 50 x 50 mm;
  • substrate temperature: – 40 … + 400 oC (depends on the process);
  • base pressure: 1x 10-7 Torr;
  • installed power: 50 kW.

Developed by Bright
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