Surface profile measurement system

Transparent films/photoresist thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review, etc.

Measurement technique: stylus profilometry

Measurement capability: two-dimensional surface profile measurements

Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB:

• fixed magnification: 2.6mm FOV (166X with 17in. monitor)
• manual zoom: variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)

Stylus sensor: low-inertia sensor (LIS 3)

Stylus force: 0.03 to 15mg (N-lite sensor)

Stylus radius: 12.5μm and 2.5μm

Sample stage:

• manual X/Y/Θ
• 100 x 100mm X-Y translation
• 360° rotation
• 150mm (6in.) travel
• 1μm repeatability
• 0.5μm resolution

Dektak software: 

• Step detection (std.)
• Stress measurement
• 3D vision analysis

Performance:

• scan length range: 55mm (2.16in.)
• data points per scan: 60,000 maximum
• max. sample thickness: up to 100mm (4in.)
• max. wafer size: 150mm (6in.)
• step height repeatability: 6Å, 1 sigma on 0.1μm step
• vertical range: 1mm (0.039in.)
• vertical resolution: 1Å max. (at 6.55μm range)