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Scanning electron microscope SEM-FIB
Scanning electron microscope SEM-FIB
Manufacturer
Tescan
Model
Lyra
Category
Microscopy
Application
Applied physics, material science
Description
A fully PC controlled SEM with Schottky field emission cathode in combination with gallium focused ion beam (FIB) column and with gas injection system (GIS):
- Accelerating voltage 200 V to 30 kV
- Probe current 2 pA to 200 nA
- Resolution in high vacuum mode 1.2 nm at 30 kV, 4.5 nm at 1 kV
- Resolution BSE: 2 nm at 30 kV
- Maximum field of view 6 mm at WD 9 mm, 17 mm at WD 30 mm
Electron optics working modes:
- resolution: high-resolution mode
- depth: sets the column up in a mode that enhances depth of focus
- field: optimizes the column to provide a large non-distorted field of view
- gallium liquid metal ion source 0.5 kV to 30 kV
- probe current 1 pA to 40 nA
- SEM-FIB angle: 55°
Chamber Vacuum:
- high vacuum mode: < 9×10-3 Pa
- low vacuum mode: 7 – 500 Pa
Other:
- micromanipulator for TEM lamella preparation
- EDX Oxford X-Max 50 mm2 detector, AZtec software
