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3D optical profiler - Zygo New View 7100 - Materize
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3D optical profiler

3D optical profiler

3D optical profiler
Manufacturer
Zygo
Model
New View 7100
Category
Materials characterization
Application

Non contact films thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review, etc.

Description
  • Measurement technique: 3D optical interferometer.
  • Field of view: from 0.5 to 2 mm.
  • Objectives: 5x, 10x and 50x.
  • Optical resolution: ≤ 4µm.
  • x/y scan rate: ≤ 26µm/sek.
  • Sample stage: motorized 150 mm x/y travel; manual ±6° tip/tilt.
  • Sample maximum size: 89 x 203 x 203 mm.
  • Vertical resolution: 0.1nm.
  • Vertical scan range: 150µm.
  • Focus: motorized manual and auto focus.
  • On-screen live display: 23″ TFT monitor with live display.
  • Scanning and processing software: ZYGO MetroPro.
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