Light optical magnification: 20 – 135x

Electron optical magnification range: 80 – 130,000x

Resolution: ≤ 10 nm

Digital zoom: max. 12x

Light optical navigation camera: color

Acceleration voltages:

• default: 5 kV, 10 kV
• advanced mode: adjustable range between 4,8 kV and 10 kV imaging mode

Vacuum modes:

• standard mode
• charge reduction mode

Detector:

• BSD
• EDS (optional)

Sample size: up to 32 mm (Ø)

Sample height: up to 100 mm